Technics Hummer V Sputter Coater
|This tool is no longer at the space. Back to list of Equipment|
|Serial Number||HUV 62735|
- Sputter coater with Au/Pd target
- Carbon arc attachment for carbon deposition
- The sputter coater was donated along with all related equipment for the SEM to a science based makerspace The Analytics Lounge, NFP.
- Their website is http://www.analyticslounge.org/
List of Currently Certified Users
|Qualified Member||Trained By|
|Ryan Pierce||Ryan Pierce|
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
The manufacturer was purchased by Anatech USA and they still support this product.
|11/24/2013||Ryan Pierce and Fitterdave||Removed flow gauge from argon regulator. It was leaking, and we suspect this was because it was designed to handle far lower pressures than even the 5 PSI currently I had been using.|
|11/9/2013||Ryan Pierce||Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow meter, but it still has a leak as tested by Ryan. Also put panels back on.|
|1?/?/2013||Ryan Pierce||Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.)|
|7/21/2013||Ryan Pierce||Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell.|
|4/?/2013||Steve Finkelman||Full cleaning of chamber.|