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Leica S430 Scanning Electron Microscope (view source)
Revision as of 14:20, 7 May 2014
, 14:20, 7 May 2014→Final Vacuum
* While the chamber air admit solenoid may be a possible culprit, this seems unlikely. Air leaks usually are larger than this. Still, plugging the solenoid is an easy way to check.
* While the chamber air admit solenoid may be a possible culprit, this seems unlikely. Air leaks usually are larger than this. Still, plugging the solenoid is an easy way to check.
* The turbomolecular pump is now a likely suspect. 1e-4 torr is only marginally better than a roughing pump can achieve. Turbopumps should drop the pressure into the e-6 range. It is possible the pump is not running at full speed. This should be investigated via the pump controller.
* The turbomolecular pump is now a likely suspect. 1e-4 torr is only marginally better than a roughing pump can achieve. Turbopumps should drop the pressure into the e-6 range. It is possible the pump is not running at full speed. This should be investigated via the pump controller.
* Applying light finger pressure to the air admit solenoid causes the chamber pressure to drop from 9.3e-5 torr to as much as 9.0e-5 torr; releasing it causes it to return to the starting value. This is repeatable. It suggests a possible leak related to the air admit solenoid.
=== Image Processor board loses communications ===
=== Image Processor board loses communications ===