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Leica S430 Scanning Electron Microscope Operations Checklist (view source)
Revision as of 01:17, 20 January 2014
, 01:17, 20 January 2014no edit summary
==OVERVIEW==
==OVERVIEW==
The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[TROUBLESHOOTING]].
The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES|PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[#TROUBLESHOOTING|TROUBLESHOOTING]].
==SEM OPERATION==
==SEM OPERATION==
===STARTUP===
===STARTUP===
* Verify power switch in Standby, vacuum pumps running.
* Verify power switch in Standby, vacuum pumps running.
** If not, go to [[#POWER / VACUUM TROUBLESHOOTING]].
** If not, go to [[#POWER / VACUUM TROUBLESHOOTING|POWER / VACUUM TROUBLESHOOTING]].
* Power switch to On.
* Power switch to On.
* Enter BIOS Password.
* Enter BIOS Password.
* View -> DataZone.
* View -> DataZone.
* Check vacuum.
* Check vacuum.
* No vacuum / right pulldown says At Air – follow [[#PUMP CHAMBER]] procedure.
* No vacuum / right pulldown says At Air:
** Follow [[#PUMP CHAMBER|PUMP CHAMBER]] procedure.
* Vacuum in e-4 torr range:
** Follow [[#VENT CHAMBER|VENT CHAMBER]] procedure.
** Wait 3 minutes for chamber to fully vent.
** Follow [[#PUMP CHAMBER|PUMP CHAMBER}} procedure.
* Vacuum in e-5 torr range or better: Proceed.
* Set X to 50.00
* Set X to 50.00
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set EHT appropriate to sample.
* Set EHT appropriate to sample.
* Locate sample.
* Locate sample.
* Focus. (see [[#FOCUS]] procedure)
* Focus. (see [[#FOCUS|FOCUS]] procedure)
* After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT]] procedure.
* After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT|FILAMENT CURRENT]] procedure.
* If an aperture other than #2 is required, follow [[#CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary.
* If an aperture other than #2 is required, follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary.
===OPERATION===
===OPERATION===
* Move sample as required to center item of interest.
* Move sample as required to center item of interest.
* Zoom (Magnifying glass icon, left mouse button) as required.
* Zoom (Magnifying glass icon, left mouse button) as required.
* When zooming, stop to focus (see FOCUS procedure) frequently.
* When zooming, stop to focus (see [[#FOCUS|FOCUS]] procedure) frequently.
* At very high magnification, move field of view with beam shift:
* At very high magnification, move field of view with beam shift:
** Beam -> Stigmation..
** Beam -> Stigmation..
** Drag scroll bars or position dot as needed.
** Drag scroll bars or position dot as needed.
** Press HOME key to undo all beam shift.
** Press HOME key to undo all beam shift.
** Consider noise reduction (see [[#NOISE REDUCTION]] procedure) if necessary prior to exporting images.
** Consider noise reduction (see [[#NOISE REDUCTION|NOISE REDUCTION]] procedure) if necessary prior to exporting images.
** Export images as needed. (see [[#EXPORT IMAGE]] procedure)
** Export images as needed. (see [[#EXPORT IMAGE|EXPORT IMAGE]] procedure)
===SHUTDOWN===
===SHUTDOWN===
* Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE]] procedure.
* Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure.
* Set X to 50.00
* Set X to 50.00
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Click SEM Shutdown.
* Click SEM Shutdown.
* Shutdown: Save Operating Conditions? Click No.
* Shutdown: Save Operating Conditions? Click No.
* Follow [[#PUSH IMAGES]] procedure if you saved images.
* Follow [[#PUSH IMAGES|PUSH IMAGES]] procedure if you saved images.
* Double click upper left box of Program Manager.
* Double click upper left box of Program Manager.
* Click OK.
* Click OK.
* Zoom in to 1000x.
* Zoom in to 1000x.
* Center on noticeable object or feature.
* Center on noticeable object or feature.
* Follow [[#FOCUS]] procedure, including anti-hysteresis. (F2)
* Follow [[#FOCUS|FOCUS]] procedure, including anti-hysteresis. (F2)
* Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question.
* Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question.
* Scan rate to fastest. (Click Fast Forward icon 3 times)
* Scan rate to fastest. (Click Fast Forward icon 3 times)
===CHANGE APERTURE===
===CHANGE APERTURE===
* Beam -> Apertures.
* Beam -> Apertures.
* Select aperture number.
* Select aperture number.
* E.g. to change from aperture #2 to #1,turn clockwise
* E.g. to change from aperture #2 to #1,turn clockwise
* Adjust Y for maximum brightness.
* Adjust Y for maximum brightness.
* Follow [[#ALIGN APERTURE]] procedure.
* Follow [[#ALIGN APERTURE|ALIGN APERTURE]] procedure.
===EXPORT IMAGE===
===EXPORT IMAGE===
** Click Line Avg. button.
** Click Line Avg. button.
* After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button.
* After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button.
* When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow EXPORT IMAGE procedure.
* When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow [[#EXPORT IMAGE|EXPORT IMAGE]] procedure.
* Restore both sliders to the left and click Frame Avg. button.
* Restore both sliders to the left and click Frame Avg. button.
* Close Noise Reduction window.
* Close Noise Reduction window.
** Wait 30 seconds.
** Wait 30 seconds.
** Press On.
** Press On.
** Proceed as normal, but follow [[#PUMP CHAMBER]] instructions.
** Proceed as normal, but follow [[#PUMP CHAMBER|PUMP CHAMBER]] instructions.
* If no lights illuminated:
* If no lights illuminated:
** If the vacuum pump is running:
** If the vacuum pump is running: