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Leica S430 Scanning Electron Microscope Operations Checklist (view source)
Revision as of 00:15, 18 March 2014
, 00:15, 18 March 2014Robot: Cosmetic changes
==OVERVIEW==
== OVERVIEW ==
The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[TROUBLESHOOTING]].
The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES|PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[#TROUBLESHOOTING|TROUBLESHOOTING]].
==SEM OPERATION==
== SEM OPERATION ==
=== STARTUP ===
* Verify power switch in Standby, vacuum pumps running.
* Verify power switch in Standby, vacuum pumps running.
** If not, go to [[#POWER / VACUUM TROUBLESHOOTING]].
** If not, go to [[#POWER / VACUUM TROUBLESHOOTING|POWER / VACUUM TROUBLESHOOTING]].
* Power switch to On.
* Power switch to On.
* Enter BIOS Password.
* Enter BIOS Password.
* View -> DataZone.
* View -> DataZone.
* Check vacuum.
* Check vacuum.
* No vacuum / right pulldown says At Air – follow [[#PUMP CHAMBER]] procedure.
* No vacuum / right pulldown says At Air:
** Follow [[#PUMP CHAMBER|PUMP CHAMBER]] procedure.
* Vacuum in e-4 torr range:
** Follow [[#VENT CHAMBER|VENT CHAMBER]] procedure.
** Wait 3 minutes for chamber to fully vent.
** Follow [[#PUMP CHAMBER|PUMP CHAMBER]] procedure.
* Vacuum in e-5 torr range or better: Proceed.
* Set X to 50.00
* Set X to 50.00
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set Tilt to 0
* Set Tilt to 0
===BEAM ON===
=== BEAM ON ===
* Press Stoplight icon.
* Press Stoplight icon.
* Wait for image.
* Wait for image.
* Set EHT appropriate to sample.
* Set EHT appropriate to sample.
* Locate sample.
* Locate sample.
* Focus. (see [[#FOCUS]] procedure)
* Focus. (see [[#FOCUS|FOCUS]] procedure)
* After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT]] procedure.
* After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT|FILAMENT CURRENT]] procedure.
* If an aperture other than #2 is required, follow [[#CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary.
* If an aperture other than #2 is required, follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary.
===OPERATION===
=== OPERATION ===
* Move sample as required to center item of interest.
* Move sample as required to center item of interest.
* Zoom (Magnifying glass icon, left mouse button) as required.
* Zoom (Magnifying glass icon, left mouse button) as required.
* When zooming, stop to focus (see FOCUS procedure) frequently.
* When zooming, stop to focus (see [[#FOCUS|FOCUS]] procedure) frequently.
* At very high magnification, move field of view with beam shift:
* At very high magnification, move field of view with beam shift:
** Beam -> Stigmation..
** Beam -> Stigmation..
** Drag scroll bars or position dot as needed.
** Drag scroll bars or position dot as needed.
** Press HOME key to undo all beam shift.
** Press HOME key to undo all beam shift.
** Consider noise reduction (see [[#NOISE REDUCTION]] procedure) if necessary prior to exporting images.
** Consider noise reduction (see [[#NOISE REDUCTION|NOISE REDUCTION]] procedure) if necessary prior to exporting images.
** Export images as needed. (see [[#EXPORT IMAGE]] procedure)
** Export images as needed. (see [[#EXPORT IMAGE|EXPORT IMAGE]] procedure)
===SHUTDOWN===
=== SHUTDOWN ===
* Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE]] procedure.
* Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure.
* Set X to 50.00
* Set X to 50.00
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Set Z to 31.0 (or less if a tall sample is in the chamber)
* Click SEM Shutdown.
* Click SEM Shutdown.
* Shutdown: Save Operating Conditions? Click No.
* Shutdown: Save Operating Conditions? Click No.
* Follow [[#PUSH IMAGES]] procedure if you saved images.
* Follow [[#PUSH IMAGES|PUSH IMAGES]] procedure if you saved images.
* Double click upper left box of Program Manager.
* Double click upper left box of Program Manager.
* Click OK.
* Click OK.
* At DOS prompt, click Standby power button.
* At DOS prompt, click Standby power button.
==PROCEDURES==
== PROCEDURES ==
===ALIGN APERTURE===
=== ALIGN APERTURE ===
* Zoom in to 1000x.
* Zoom in to 1000x.
* Center on noticeable object or feature.
* Center on noticeable object or feature.
* Follow [[#FOCUS]] procedure, including anti-hysteresis. (F2)
* Follow [[#FOCUS|FOCUS]] procedure, including anti-hysteresis. (F2)
* Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question.
* Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question.
* Scan rate to fastest. (Click Fast Forward icon 3 times)
* Scan rate to fastest. (Click Fast Forward icon 3 times)
* Click Off button in focus wobble box.
* Click Off button in focus wobble box.
===CHANGE APERTURE===
=== CHANGE APERTURE ===
* Beam -> Apertures.
* Beam -> Apertures.
* Select aperture number.
* Select aperture number.
* E.g. to change from aperture #2 to #1,turn clockwise
* E.g. to change from aperture #2 to #1,turn clockwise
* Adjust Y for maximum brightness.
* Adjust Y for maximum brightness.
* Follow [[#ALIGN APERTURE]] procedure.
* Follow [[#ALIGN APERTURE|ALIGN APERTURE]] procedure.
===EXPORT IMAGE===
=== EXPORT IMAGE ===
* File -> Export TIFF
* File -> Export TIFF
* Click Freeze if image not already frozen.
* Click Freeze if image not already frozen.
* Image -> Unfreeze
* Image -> Unfreeze
===FILAMENT CURRENT===
=== FILAMENT CURRENT ===
* Scan rate to fastest. (Click Fast Forward icon 3 times)
* Scan rate to fastest. (Click Fast Forward icon 3 times)
* Click light bulb icon.
* Click light bulb icon.
** If well defined 2nd peak is visible, adjust for maximum brightness such that ANY decrease in current decreases image intensity. NOTE: Any operation above this point even more drastically shortens filament life and must be avoided.
** If well defined 2nd peak is visible, adjust for maximum brightness such that ANY decrease in current decreases image intensity. NOTE: Any operation above this point even more drastically shortens filament life and must be avoided.
===FOCUS===
=== FOCUS ===
* Consider anti-hysteresis (F2) after major parameter changes. (zoom changes
* Consider anti-hysteresis (F2) after major parameter changes. (zoom changes
* Consider reduced raster. (Monitor icon with square, size and drag as appropriate)
* Consider reduced raster. (Monitor icon with square, size and drag as appropriate)
* NOTE: Auto-focus can be done via F key but it can sometimes make focus worse.
* NOTE: Auto-focus can be done via F key but it can sometimes make focus worse.
===NOISE REDUCTION===
=== NOISE REDUCTION ===
* Scan rate to slowest. (Click Rewind icon 3 times)
* Scan rate to slowest. (Click Rewind icon 3 times)
* Image -> Noise Reduction..
* Image -> Noise Reduction..
** Click Line Avg. button.
** Click Line Avg. button.
* After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button.
* After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button.
* When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow EXPORT IMAGE procedure.
* When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow [[#EXPORT IMAGE|EXPORT IMAGE]] procedure.
* Restore both sliders to the left and click Frame Avg. button.
* Restore both sliders to the left and click Frame Avg. button.
* Close Noise Reduction window.
* Close Noise Reduction window.
* Image -> Unfreeze.
* Image -> Unfreeze.
===PUSH IMAGES===
=== PUSH IMAGES ===
* WARNING: Only do this when LEO UIF software is shut down!
* WARNING: Only do this when LEO UIF software is shut down!
* Double click “Push [Your Name]” from list of icons in User Operations window.
* Double click “Push [Your Name]” from list of icons in User Operations window.
* Black screen and lots of scrolling text: Success.
* Black screen and lots of scrolling text: Success.
** Download images from ftp://semsrv.pumpingstationone.org to a laptop or other device.
** Download images from ftp://semsrv.pumpingstationone.org to a laptop or other device. NOTE: This URL is only available on PS:One's internal network.
** Double click “Delete [Your Name]” from list of icons in User Operations window. This deletes the images from the SEM hard disk.
** Double click “Delete [Your Name]” from list of icons in User Operations window. This deletes the images from the SEM hard disk.
** NOTE: No automatic delete happens on the SEM hard disk. Users must delete images once they have been safely transferred off the SEM.
** NOTE: No automatic delete happens on the SEM hard disk. Users must delete images once they have been safely transferred off the SEM.
** Repeat this procedure WITHOUT LAUNCHING LEO UIF.
** Repeat this procedure WITHOUT LAUNCHING LEO UIF.
===PUMP CHAMBER===
=== PUMP CHAMBER ===
* Press V (if vacuum window not open).
* Press V (if vacuum window not open).
* Click Pump.
* Click Pump.
* If vacuum does not reach this level in 20 minutes, report to mailing list.
* If vacuum does not reach this level in 20 minutes, report to mailing list.
===VENT CHAMBER===
=== VENT CHAMBER ===
* Press V (if vacuum window not open).
* Press V (if vacuum window not open).
* Click Vent.
* Click Vent.
==TROUBLESHOOTING==
== TROUBLESHOOTING ==
===MOUSE TROUBLESHOOTING===
=== MOUSE TROUBLESHOOTING ===
* In case of erratic mouse movement:
* In case of erratic mouse movement:
** Lift mouse, shake it, blow into track ball
** Lift mouse, shake it, blow into track ball
** Click anywhere else within the image.
** Click anywhere else within the image.
===POWER / VACUUM TROUBLESHOOTING===
=== POWER / VACUUM TROUBLESHOOTING ===
* If Off light is illuminated:
* If Off light is illuminated:
** SEM likely lost power. Report loss of power to mailing list.
** SEM likely lost power. Report loss of power to mailing list.
** Wait 30 seconds.
** Wait 30 seconds.
** Press On.
** Press On.
** Proceed as normal, but follow [[#PUMP CHAMBER]] instructions.
** Proceed as normal, but follow [[#PUMP CHAMBER|PUMP CHAMBER]] instructions.
* If no lights illuminated:
* If no lights illuminated:
** If the vacuum pump is running:
** If the vacuum pump is running: