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| ==OVERVIEW== | | ==OVERVIEW== |
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− | The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[TROUBLESHOOTING]]. | + | The SEM Operation checklist in Section 2 contains step by step instructions to operate the SEM. Note that these steps reference Procedures described in [[#PROCEDURES|PROCEDURES]]. These are listed in alphabetical order. For troubleshooting, see [[#TROUBLESHOOTING|TROUBLESHOOTING]]. |
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| ==SEM OPERATION== | | ==SEM OPERATION== |
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| ===STARTUP=== | | ===STARTUP=== |
− |
| |
| * Verify power switch in Standby, vacuum pumps running. | | * Verify power switch in Standby, vacuum pumps running. |
− | ** If not, go to [[#POWER / VACUUM TROUBLESHOOTING]]. | + | ** If not, go to [[#POWER / VACUUM TROUBLESHOOTING|POWER / VACUUM TROUBLESHOOTING]]. |
| * Power switch to On. | | * Power switch to On. |
| * Enter BIOS Password. | | * Enter BIOS Password. |
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| * View -> DataZone. | | * View -> DataZone. |
| * Check vacuum. | | * Check vacuum. |
− | * No vacuum / right pulldown says At Air – follow [[#PUMP CHAMBER]] procedure. | + | * No vacuum / right pulldown says At Air: |
− | ** Vacuum in e-4 torr range:
| + | ** Follow [[#PUMP CHAMBER|PUMP CHAMBER]] procedure. |
− | *** Follow [[#VENT CHAMBER]] procedure.
| + | * Vacuum in e-4 torr range: |
− | *** Wait 3 minutes for chamber to fully vent.
| + | ** Follow [[#VENT CHAMBER|VENT CHAMBER]] procedure. |
− | *** Follow [[#PUMP CHAMBER}} procedure.
| + | ** Wait 3 minutes for chamber to fully vent. |
− | ** Vacuum in e-5 torr range or better: Proceed.
| + | ** Follow [[#PUMP CHAMBER|PUMP CHAMBER}} procedure. |
| + | * Vacuum in e-5 torr range or better: Proceed. |
| * Set X to 50.00 | | * Set X to 50.00 |
| * Set Z to 31.0 (or less if a tall sample is in the chamber) | | * Set Z to 31.0 (or less if a tall sample is in the chamber) |
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| * Set EHT appropriate to sample. | | * Set EHT appropriate to sample. |
| * Locate sample. | | * Locate sample. |
− | * Focus. (see [[#FOCUS]] procedure) | + | * Focus. (see [[#FOCUS|FOCUS]] procedure) |
− | * After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT]] procedure. | + | * After 5 minutes since adjusting EHT have elapsed, follow [[#FILAMENT CURRENT|FILAMENT CURRENT]] procedure. |
− | * If an aperture other than #2 is required, follow [[#CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary. | + | * If an aperture other than #2 is required, follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure. NOTE: #2 aperture is usually the best aperture, so changing apertures isn’t necessary. |
| | | |
| ===OPERATION=== | | ===OPERATION=== |
| * Move sample as required to center item of interest. | | * Move sample as required to center item of interest. |
| * Zoom (Magnifying glass icon, left mouse button) as required. | | * Zoom (Magnifying glass icon, left mouse button) as required. |
− | * When zooming, stop to focus (see FOCUS procedure) frequently. | + | * When zooming, stop to focus (see [[#FOCUS|FOCUS]] procedure) frequently. |
| * At very high magnification, move field of view with beam shift: | | * At very high magnification, move field of view with beam shift: |
| ** Beam -> Stigmation.. | | ** Beam -> Stigmation.. |
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| ** Drag scroll bars or position dot as needed. | | ** Drag scroll bars or position dot as needed. |
| ** Press HOME key to undo all beam shift. | | ** Press HOME key to undo all beam shift. |
− | ** Consider noise reduction (see [[#NOISE REDUCTION]] procedure) if necessary prior to exporting images. | + | ** Consider noise reduction (see [[#NOISE REDUCTION|NOISE REDUCTION]] procedure) if necessary prior to exporting images. |
− | ** Export images as needed. (see [[#EXPORT IMAGE]] procedure) | + | ** Export images as needed. (see [[#EXPORT IMAGE|EXPORT IMAGE]] procedure) |
| | | |
| ===SHUTDOWN=== | | ===SHUTDOWN=== |
− | * Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE]] procedure. | + | * Change to aperture #2 and align aperture if you previously changed to a different aperture. Follow [[#CHANGE APERTURE|CHANGE APERTURE]] procedure. |
| * Set X to 50.00 | | * Set X to 50.00 |
| * Set Z to 31.0 (or less if a tall sample is in the chamber) | | * Set Z to 31.0 (or less if a tall sample is in the chamber) |
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| * Click SEM Shutdown. | | * Click SEM Shutdown. |
| * Shutdown: Save Operating Conditions? Click No. | | * Shutdown: Save Operating Conditions? Click No. |
− | * Follow [[#PUSH IMAGES]] procedure if you saved images. | + | * Follow [[#PUSH IMAGES|PUSH IMAGES]] procedure if you saved images. |
| * Double click upper left box of Program Manager. | | * Double click upper left box of Program Manager. |
| * Click OK. | | * Click OK. |
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| * Zoom in to 1000x. | | * Zoom in to 1000x. |
| * Center on noticeable object or feature. | | * Center on noticeable object or feature. |
− | * Follow [[#FOCUS]] procedure, including anti-hysteresis. (F2) | + | * Follow [[#FOCUS|FOCUS]] procedure, including anti-hysteresis. (F2) |
| * Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question. | | * Reduced raster (Monitor icon with square) - size and drag to cover noticeable object or feature in question. |
| * Scan rate to fastest. (Click Fast Forward icon 3 times) | | * Scan rate to fastest. (Click Fast Forward icon 3 times) |
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| | | |
| ===CHANGE APERTURE=== | | ===CHANGE APERTURE=== |
− |
| |
| * Beam -> Apertures. | | * Beam -> Apertures. |
| * Select aperture number. | | * Select aperture number. |
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| * E.g. to change from aperture #2 to #1,turn clockwise | | * E.g. to change from aperture #2 to #1,turn clockwise |
| * Adjust Y for maximum brightness. | | * Adjust Y for maximum brightness. |
− | * Follow [[#ALIGN APERTURE]] procedure. | + | * Follow [[#ALIGN APERTURE|ALIGN APERTURE]] procedure. |
| | | |
| ===EXPORT IMAGE=== | | ===EXPORT IMAGE=== |
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| ** Click Line Avg. button. | | ** Click Line Avg. button. |
| * After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button. | | * After making adjustments, wait for scan to pass the bottom of the screen and, when visible at the top, click Freeze mode / At end button. |
− | * When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow EXPORT IMAGE procedure. | + | * When blue square appears in the lower right corner of the screen, the image is frozen and can be exported. Follow [[#EXPORT IMAGE|EXPORT IMAGE]] procedure. |
| * Restore both sliders to the left and click Frame Avg. button. | | * Restore both sliders to the left and click Frame Avg. button. |
| * Close Noise Reduction window. | | * Close Noise Reduction window. |
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| ** Wait 30 seconds. | | ** Wait 30 seconds. |
| ** Press On. | | ** Press On. |
− | ** Proceed as normal, but follow [[#PUMP CHAMBER]] instructions. | + | ** Proceed as normal, but follow [[#PUMP CHAMBER|PUMP CHAMBER]] instructions. |
| * If no lights illuminated: | | * If no lights illuminated: |
| ** If the vacuum pump is running: | | ** If the vacuum pump is running: |