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Technics Hummer V Sputter Coater (view source)
Revision as of 16:41, 10 July 2013
, 16:41, 10 July 2013→Status
* Power cord is scary and needs to be replaced.
* Power cord is scary and needs to be replaced.
* Gas flow rate meter has a small leak, needs a new gasket.
* Gas flow rate meter has a small leak, needs a new gasket.
* Changing the vacuum oil would be a good idea.
* Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed.
* Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed.