Technics Hummer V Sputter Coater
Configuration
- Standard sputter coater
- Carbon arc attachment for carbon deposition
Status
- Requires argon for operation.
- Gas flow rate meter has a small leak, needs a new gasket.
List of Currently Certified Users
Qualified Member | Trained By |
---|---|
Ryan Pierce | Ryan Pierce |
Documentation
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
The manufacturer was purchased by Anatech USA and they still support this product.
Maintenance Log
Date | Maintainer | Description | ||||
---|---|---|---|---|---|---|
11/9/2013 | Ryan Pierce | Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow valve but it still has a leak as tested by a Ryan. | ||||
10/?/2013 | Ryan Pierce | Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.) | 7/21/2013 | Ryan Pierce | Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell. | |
4/?/2013 | Steve Finkelman | Full cleaning of chamber. |