Technics Hummer V Sputter Coater
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This tool is currently broken, please contact the area host for more information. |
Configuration
- Standard sputter coater
- Carbon arc attachment for carbon deposition
Status
- Requires argon for operation. Preferably high purity argon.
- Power cord is scary and needs to be replaced.
- Gas flow rate meter has a small leak, needs a new gasket.
- Changing the vacuum oil would be a good idea.
- Initial tests with welding argon showed that it worked and was sputtering metal, however maintaining a plasma seemed to use a lot of current. The former operator suggested pulsing it to burn any oxygen in the chamber out. The manufacturer suggested a short that could be remedied by a good cleaning, which was performed.
List of Currently Certified Users
Qualified Member | Trained By |
---|---|
Ryan Pierce | Ryan Pierce |
Steve Finkelman | Steve Finkelman |
Documentation
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
The manufacturer was purchased by Anatech USA and they still support this product.
Maintenance Log
Date | Maintainer | Description |
---|---|---|
7/21/2013 | Ryan Pierce | Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell. |
4/?/2013 | Steve Finkelman | Full cleaning of chamber. |