Difference between revisions of "Technics Hummer V Sputter Coater"
Jump to navigation
Jump to search
m (Robot: Cosmetic changes) |
|||
Line 1: | Line 1: | ||
− | |||
− | |||
{{Template:EquipmentPage | {{Template:EquipmentPage | ||
|owner = PS:One | |owner = PS:One | ||
Line 15: | Line 13: | ||
}} | }} | ||
− | ==Configuration== | + | == Configuration == |
* Sputter coater with Au/Pd target | * Sputter coater with Au/Pd target | ||
* Carbon arc attachment for carbon deposition | * Carbon arc attachment for carbon deposition | ||
− | ==Status== | + | == Status == |
* Requires argon for operation. | * Requires argon for operation. | ||
− | ==List of Currently Certified Users== | + | == List of Currently Certified Users == |
{| class="wikitable" border="1" | {| class="wikitable" border="1" | ||
! Qualified Member | ! Qualified Member | ||
Line 32: | Line 30: | ||
|} | |} | ||
− | ==Documentation== | + | == Documentation == |
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed. | Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed. | ||
The manufacturer was purchased by [http://www.anatechusa.com Anatech USA] and they still support this product. | The manufacturer was purchased by [http://www.anatechusa.com Anatech USA] and they still support this product. | ||
− | ==Maintenance Log== | + | == Maintenance Log == |
{| class="wikitable" border="1" | {| class="wikitable" border="1" | ||
! Date | ! Date | ||
Line 65: | Line 63: | ||
|} | |} | ||
+ | |||
+ | [[Category:Science]] |
Revision as of 00:29, 18 March 2014
Configuration
- Sputter coater with Au/Pd target
- Carbon arc attachment for carbon deposition
Status
- Requires argon for operation.
List of Currently Certified Users
Qualified Member | Trained By |
---|---|
Ryan Pierce | Ryan Pierce |
Documentation
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
The manufacturer was purchased by Anatech USA and they still support this product.
Maintenance Log
Date | Maintainer | Description |
---|---|---|
11/24/2013 | Ryan Pierce and Fitterdave | Removed flow gauge from argon regulator. It was leaking, and we suspect this was because it was designed to handle far lower pressures than even the 5 PSI currently I had been using. |
11/9/2013 | Ryan Pierce | Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow meter, but it still has a leak as tested by Ryan. Also put panels back on. |
1?/?/2013 | Ryan Pierce | Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.) |
7/21/2013 | Ryan Pierce | Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell. |
4/?/2013 | Steve Finkelman | Full cleaning of chamber. |